20 September 2011
In order to improve system quality and several heat sources should be flexible.
Total Optimal Control System for heat sources can give a good solution to situation. Based on measured data, i.e. make the maximum use of heat balance. The “TOCS” is considered for an additional construction plan and set up in a large scale semiconductor production factory The following excellent results were obtained during operation. The annual system COP based on secondary energy equivalent was 8.0 and the amount of CO2 emission per thermal unit was 14.8 kg-CO2/GJ/year.